Hydrogen annealing evaluation by temperature-programmed desorption gas analysis (TDS)
You can check the gas components released from the Ta board and the desorption temperature of hydrogen!
As part of the widely used "hydrogen annealing evaluation" in semiconductor manufacturing, we present a case measured using TDS (Thermal Desorption Spectroscopy). By performing mass spectrometry while heating in a vacuum, we were able to confirm the desorbed gas components from the Ta plate and the desorption temperature of hydrogen. Additionally, by mass analyzing the desorbed gases, we can identify the types of gases and understand the desorption behavior of specific components. [Case Overview] - Heating desorption gas profile from the sample - Identification of desorbed gas species and comparison of desorbed gas amounts through mass spectrometry (m/z = 1 to 199) *For more details, please download the PDF or feel free to contact us.
- Company：東芝ナノアナリシス
- Price：Other
